In
recent decades, sputtering deposition has become an increasingly popular method
of physical vapor deposition (PVD). As the name implies, this particular PVD
process sputters thin film onto its target, effectively providing it with a
protective coating. It’s important to keep in mind, however, that sputter
deposition is not a monolith.
There
are several different varieties of sputter deposition, each one of which is
unique in its own right. Anyone interested in learning more about this
fascinating method of PVD should read up on the following types of sputter
deposition.
Reactive
With
reactive sputtering deposition, a chemical reaction is
experienced by the sputtered particles before they’re able to coat their target.
This chemical reaction is caused by a reactive gas like nitrogen or oxygen
being released into the sputtering chamber. During this process, the resulting
film’s composition can be modified by adjusting the pressure of the
aforementioned gases.
High Target
Utilization
With
high target utilization sputter deposition, the coating and its intended target
are very closely intertwined. This process involves plasma being generated in a
side-opening that leads into the main process chamber. Because of the independent
plasma source, this process yields high plasma densities, increased levels of
ionization and a reduction in target poisoning and other negative effects.
Ion Beam
True to
its name, ion beam sputter deposition entails using an ion beam to apply
protective film to intended targets. An ionized coating is presented in the
form of a liquid solution, evaporated solid or gas before being accelerated and
focused on the target. When deposition energy is particularly high, a process
called ion implantation takes place, whereby the ions penetrate their target
very deeply.
When it
comes to physical vapor deposition, there’s no denying that sputter deposition
is among one of the most unique methods. In light of its incredible convenience
and cost-effectiveness, it’s no wonder sputter deposition continues to be one
of the vacuum coating industry’s rising stars. If you would like more
information regarding vacuum coating technology, visit VTCMag.com and subscribe
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